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Item
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Model No.
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Picture
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Spec.
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Sheet
Exposure
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Hap-5020i
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Panel Size : Min 330X250mm, Max 640X540mm
Panel Thickness : 0.06~2.0mm
Photo Mask : Film or Glass
UV lamp : 5.0kw short arc mercury lamp
Collimation ; less than 1.2'(half angle)
Declination : less than 1.0'
Integrated exposing : Max.9990mJ/cm2
UV intensity : 30mw/cm2
Peak Wavelength : 365nm
Lamp Cooling : air cooling
Alignment accuracy : 10㎛/3σ
Loding System : Table Carrier System
D3 : The Whole 2 or 3 Sections
D6 : The Whole 2,3,4 or 6 Sections
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RR Exposure
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Hap-3550FX
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Panel Width : 250mm, 500mm
Panel Thickness : 0.03~0.2mm
Photo Mask : Glass
UV lamp : 5.0kw short arc mercury lamp
Collimation ; less than 1.2'(half angle)
Declination : less than 1.0'
Integrated exposing : Max.9990mJ/cm2
UV intensity : 30mw/cm2
Peak Wavelength : 365nm
Lamp Cooling : air cooling
Alignment accuracy : 10㎛
D3 : The Whole 2 or 3 Sections
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Laminator
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Mach-630up
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Panel Size : Min 250X250mm, Max 640X640mm
Panel Thickness : 0.1~6.0mm , (0.06~1.0mm)
Conveyor Speed : 1.0 ~ 5.5m/min
Conveyor Width : 640mm
Laminator Roll : 2 Roll x ￠77.5 x 680mm
Laminator Roll : Silicon Rubber 70℃ Durometer
Roll Pressure M/C : Ultra High Pressure M/c
Film Placement Front-Back Accuracy ±1.0mm
Film Placement Side-Side Accuracy ±1.0mm
Film Tacking(Heater & Silicon) : ￠3.2 x 645(L), 27.5V, 100W x2
Removable DF Cartridge System 2Pcs
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Mach-760up
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Panel Size : Min 400X400mm, Max 770X820mm
Panel Thickness : 0.1~12.0mm , (0.06~2.0mm)
Conveyor Speed : 1.0 ~ 5.5m/min
Conveyor Width : 770mm
Laminator Roll : 2 Roll x ￠77.5 x 810mm
Laminator Roll : Silicon Rubber 70℃ Durometer
Roll Pressure M/C : Ultra High Pressure M/c
Film Placement Front-Back Accuracy ±1.0mm
Film Placement Side-Side Accuracy ±1.0mm
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Pre-Heater
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PTH-24i
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Panel Size : Min 200 ~ Max 650mm
Panel Thickness : 0.1~3.5mm
Conveyor Speed : 1.0 ~ 5.5m/min
Conveyor Width : 200 ~ 700mm
HOT Roll :￠73.4 x 730mm(L) x 6 Pcs, (0.9KW x 220V)
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Stepper Exposure
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LS-300SB
/LS-360SB
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Projection magnification: ×1.4 enlarging projection
UV lamp: 12kW
Initial illuminance power: 83mW/cm2 ＊12kW, 78mW/cm2 ＊12kW
Uniformity: ≦ ±3%
Wave length: i-line
(365nm)
Exposure area (Max): 170×255mm
(φ=307mm), 260×260mm (φ=368mm)
Exposure area (Min) :7.5×7.5mm
Depth of field: 150µm
Lens NA: 0.048
Resolution: L/S_
5/5µm
Overlay accuracy:≦ ±5.0µm
Scaling X-Y:±100ppm
(±25µm),± 200(±100µm)
Scaling of deformation: ±25ppm
(±10µm)
Plate size: Max
510×610mm (thickness:0.2～2.0mm)
Mask Size: 9inch (thickness: 4.8±0.2mm)
Mask library: 5set ＊Max 20set with original holder
TPT (4/6 shot): 28sec
/ 36sec, 30sec / 38sec
Dimension: W3.6×D2.5×H2.85m, W3.6×D2.5×H2.6m
Chamber temp. setting: 21.0～27.0℃
Cleanliness: Class 100
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